| 发明名称 |
SENSING AREA PROTECTOR IN SENSOR |
| 摘要 |
<p>PURPOSE: A member for protecting the sensing region of a sensor is provided to prevent the deterioration of a sensor due to particles remaining on the sensor for monitoring a wafer. CONSTITUTION: A sensor(100) includes a body(110) and a cover(200). The body is formed in a sensing region(120). The cover is mounted on the upper part of the body and has a round structure. The cover is made of transparent acrylic for minimizing the sensing deterioration of the sensing region. The cover has a tilt surface for removing particles and protects the sensing region from external impacts.</p> |
| 申请公布号 |
KR20130034414(A) |
申请公布日期 |
2013.04.05 |
| 申请号 |
KR20110098401 |
申请日期 |
2011.09.28 |
| 申请人 |
HYUNDAI HEAVY INDUSTRIES CO., LTD. |
发明人 |
LEE, GYU DONG |
| 分类号 |
H01L21/677;H01L21/66;H01L31/04 |
主分类号 |
H01L21/677 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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