| 摘要 |
PURPOSE: A substrate inspecting method is provided to input and save a coordinate value and fault code value through a computerization process, thereby accurately and rapidly performing an inspection process. CONSTITUTION: A substrate inspecting method comprises next steps. A coordinate value indicating a position of a pseudo fault detected by an automatic optical inspecting device is saved in a database by using a programmed primary procedure function(S104). A fault coordinate value corresponding to the true fault is saved in the database by suing the programmed secondary procedure function(S203). [Reference numerals] (AA) Start; (BB) Finish; (S101) Coordinate value input; (S102) Coordinate value extraction; (S103) Existing on a primary saving table?; (S104, S203) Addition; (S105) Coordinate value corresponding to the last decision failure?; (S106, S204) Renewal; (S201) Failure code value input; (S202) Existing on a secondary saving table? |
