发明名称 PREPARATION OF SEMICONDUCTOR FILMS
摘要 <p>The invention relates to a preparation process for thin semiconducting inorganic films comprising various metals (Cu/In/Zn/Ga/Sn), selenium and/or sulfur. The process uses molecular precursors comprising metal complexes with oximato ligands. Copper-based chalcopyrites of the I-III-IV2-type are prepared with high purity at low temperatures under ambient conditions. The thin films can be used in photovoltaic panels (solar cells).</p>
申请公布号 KR20130034662(A) 申请公布日期 2013.04.05
申请号 KR20137002259 申请日期 2011.05.31
申请人 MERCK PATENT GMBH 发明人 DESHMUKH RANJAN DEEPAK;KUEGLER RALF;SCHNEIDER JOERG J.;HOFFMANN RUDOLF
分类号 H01L21/368;H01L21/02 主分类号 H01L21/368
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