METHOD FOR PREPARING MONO GERMANE GAS IN HIGH YIELD

摘要

PURPOSE: A manufacturing method of a mono-germane gas is provided to minimize the consumption of germanium dioxide and maximize yield of mono-germane gas and to maximize yield of mono-germane gas. CONSTITUTION: A manufacturing method of a mono-germane gas comprises a step of injecting an acid aqueous solution and an alkali aqueous solution into a reactor including germanium dioxide and alkali metal hybrid. The mono-germane gas and the reaction solution is generated by reacting the acid aqueous solution and alkali aqueous solution to generate mono-germane gas and reaction solution; and a step of additionally adding mixture aqueous solution of alkali metal hydroxide and alkali metal borohydride into the result to generate mono-germane gas. The reactor for the reaction is microchannel reactor. The molar ratio of the alkali metal hydroxide and alkali metal borohydride the mixture aqueous solution is 2:8-8:3.