DEVICE FOR CONTROLLING LASER OUTPUT AND METHOD THEREOF

摘要

PURPOSE: A laser output adjustment apparatus and a method thereof are provided to easily adjust an output of a laser beam irradiated in a substrate. CONSTITUTION: A laser unit(100) generates a laser beam(10). An optical unit(200) provides a path of the laser beam. A processing unit(300) irradiates the laser beam passing the optical unit in a substrate(20). A first measurement unit(400) is arranged between the laser unit and the optical unit and measures an output of the laser beam generated from the laser unit. A second measurement unit(500) is arranged within the optical unit and measures the output of the laser beam passing the optical unit. A controlling unit(600) receives an output signal of the laser beam measured in the first measurement unit and the second measurement unit, transmits the signal to the laser unit, and adjusts the output of the laser beam generated from the laser unit. [Reference numerals] (100) Laser unit; (200) Optical unit; (400) First measurement unit; (500) Second measurement unit; (600) Controlling unit;