发明名称 Method of forming a magnetic tunnel junction device
摘要 A method of forming a magnetic tunnel junction device is disclosed that includes forming a trench in a substrate, the trench including a plurality of sidewalls and a bottom wall. The method includes depositing a first conductive material within the trench proximate to one of the sidewalls and depositing a second conductive material within the trench. The method further includes depositing a material to form a magnetic tunnel junction (MTJ) structure within the trench. The MTJ structure includes a fixed magnetic layer having a magnetic field with a fixed magnetic orientation, a tunnel junction layer, and a free magnetic layer having a magnetic field with a configurable magnetic orientation. The method further includes selectively removing a portion of the MTJ structure to create an opening in the MTJ structure.
申请公布号 KR101251365(B1) 申请公布日期 2013.04.05
申请号 KR20107022329 申请日期 2009.02.27
申请人 发明人
分类号 G11C11/15;G11C11/16;H01L27/115 主分类号 G11C11/15
代理机构 代理人
主权项
地址