| 发明名称 |
APPARATUS AND METHOD FOR TREATING SUBSTRATE |
| 摘要 |
Provided are an apparatus and method for treating a substrate through a supercritical process. The apparatus includes a housing providing a space for performing a process, and a plurality of support members vertically arranged in the housing at predetermined intervals to support edges of substrates, respectively. |
| 申请公布号 |
US2013081658(A1) |
申请公布日期 |
2013.04.04 |
| 申请号 |
US201213609986 |
申请日期 |
2012.09.11 |
| 申请人 |
SONG GIL HUN;BAE JEONG YONG;KOO KYO WOOG;SEMES CO., LTD. |
发明人 |
SONG GIL HUN;BAE JEONG YONG;KOO KYO WOOG |
| 分类号 |
B08B3/00 |
主分类号 |
B08B3/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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