| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma light source and a plasma light generating method, capable of improving stability of reconnection of a current path in which a planar discharge generated in two coaxial electrodes is reconnected to a tubular discharge between coaxial electrodes, and improving output, stability, and reliability of the plasma light source. <P>SOLUTION: A reconnection point, which is when a planar discharge 2 generated between a guiding electrode c and a center electrode b in two coaxial electrodes a is reconnected to a tubular discharge 4 between the coaxial electrodes, is set before a peak point of a discharge current against the coaxial electrodes a by a discharge voltage. <P>COPYRIGHT: (C)2013,JPO&INPIT |
