发明名称 SEMICONDUCTOR DEVICE
摘要 <p>The purpose of the present invention is to provide a semiconductor device that has high voltage and high reliability, without forming an embedded injection layer with high positional accuracy. This semiconductor device is provided with: a base (2), which is formed on a semiconductor surface layer of a first conductivity type, and serves as an active region of a second conductivity type constituting a semiconductor element; guard rings (11 to 16), which are formed on the semiconductor surface layer apart from each other in such a manner that each guard ring surrounds the base (2) in a plan view, and serve as a plurality of first impurity regions of the second conductivity type; and an embedded injection layer (18), which is embedded in the semiconductor surface layer, connects at least two of the bottom sections of the plurality of guard rings (11 to 16), and serves as second impurity region of the second conductivity type.</p>
申请公布号 WO2013046908(A1) 申请公布日期 2013.04.04
申请号 WO2012JP69407 申请日期 2012.07.31
申请人 MITSUBISHI ELECTRIC CORPORATION;KAWAKAMI TSUYOSHI;NAKAKI YOSHIYUKI;FUJII YOSHIO;WATANABE HIROSHI;NAKATA SHUHEI;EBIHARA KOHEI;FURUKAWA AKIHIKO 发明人 KAWAKAMI TSUYOSHI;NAKAKI YOSHIYUKI;FUJII YOSHIO;WATANABE HIROSHI;NAKATA SHUHEI;EBIHARA KOHEI;FURUKAWA AKIHIKO
分类号 H01L29/06;H01L29/12;H01L29/47;H01L29/78;H01L29/861;H01L29/868;H01L29/872 主分类号 H01L29/06
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