NANOIMPRINTING APPARATUS, NANOIMPRINTING METHOD, DISTORTION IMPARTING DEVICE AND DISTORTION IMPARTING METHOD

摘要

In nanoimprinting, contact between a pattern of protrusions and recesses of a mold and resist being initiated at the center thereof is enabled utilizing any imprinting member regardless of the rigidity of the imprinting member. A nanoimprinting apparatus (10) is equipped with: a distortion imparting device (20) that applies external force onto an imprinting member (1) to maintain the imprinting member (1) in a predetermined flexed state, thereby imparting permanent distortion to the imprinting member (1); and an imprinting unit (40) that utilizes the imprinting member (1) having the permanent distortion imparted thereto and presses a pattern (2) of protrusions and recesses of a mold (1) onto resist (7) provided on a substrate (6), to transfer the pattern (2) of protrusions and recesses to the resist (7).