| 摘要 |
<p>While in-focus sample observation is possible with the Foucault method, which is one of the Lorentz electron microscope methods, it is not possible to obtain information by an electron beam which has leaked in a selection of a specific polarization angle or bearing. Accordingly, in order to obtain information of the electron beam projection region overall, a plurality of observations has been necessary, such as selecting anew an electron beam polarization component and forming an image. With this method, a plurality of adjustments of an optical assembly have been necessary, and even if the information of the projection region overall is obtained, the observations are at temporally different timings, with dynamic or realtime observations being impossible. The present invention projects a single electron beam upon a sample (3) and, using an electron beam bi-prism (9) which is positioned in an electron optical angular space, etc., simultaneously forms images (321, 323) of the sample by electron beams which are separate in polarization for each propagation direction of each respective electron beam, as well as having different locations in the image plane of the electron optic assembly.</p> |
