SCANNING ELECTRON MICROSCOPE AND CURRENT MEASUREMENT METHOD USING THE SAME

摘要

PURPOSE: A scanning electron microscope and a method for measuring the amount of current of a first electron using the same are provided to easily measure the amount of current of the first electron while detecting a second electron by integrally forming a first detecting device and a filter applying electromagnetic field to the first and second electrons in the inside of a main tube. CONSTITUTION: A main tube(10) comprises an accommodation space inside. A source(20) is installed at the inside of the main tube. The source generates a first electron charged toward a test specimen outside the main tube. A filter(40) varies the moving path of a second electron. A first detecting device(61) detects the current amount of the first electron having a varied path. A second detecting device(62) detects the current amount of the second electron having a varied path. A filter control part(50) controls the filter to selectively vary the moving paths of the first and second moving paths.