发明名称 THERMAL SPRAY POWDER AND FILM THAT CONTAIN RARE-EARTH ELEMENT, AND MEMBER PROVIDED WITH FILM
摘要 This thermal spray powder contains a rare-earth element, and at least one element which is a diluent element that is not a rare-earth element or oxygen, and which is selected from, for example, zinc, silicon, boron, phosphorous, titanium, calcium, strontium and magnesium. A sintered body of a single oxide of the diluent element has an erosion rate under specific etching conditions that is at least five times the erosion rate of a yttrium oxide sintered body under the same etching conditions.
申请公布号 WO2013047588(A1) 申请公布日期 2013.04.04
申请号 WO2012JP74718 申请日期 2012.09.26
申请人 FUJIMI INCORPORATED;TOKYO ELECTRON LIMITED;MIZUNO, HIROAKI;KITAMURA, JUNYA;KOBAYASHI, YOSHIYUKI 发明人 MIZUNO, HIROAKI;KITAMURA, JUNYA;KOBAYASHI, YOSHIYUKI
分类号 C23C4/10 主分类号 C23C4/10
代理机构 代理人
主权项
地址