发明名称 REMOVING CONDUCTIVE MATERIAL TO FORM CONDUCTIVE FEATURES IN A SUBSTRATE
摘要 Apparatuses having, and methods for forming, conductive features are described. A hole is formed in a substrate and a conductive material is deposited in the hole. A part of the conductive material that occupies a first lengthwise portion of the hole is removed, and a conductive feature that occupies a second lengthwise portion of the hole remains in the substrate.
申请公布号 US2013082359(A1) 申请公布日期 2013.04.04
申请号 US201213633825 申请日期 2012.10.02
申请人 MARVELL WORLD TRADE LTD. 发明人 SUTARDJA SEHAT
分类号 H01L23/48;H01L21/768 主分类号 H01L23/48
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