发明名称 METHOD OF PRODUCING ORGANIC ELECTROLUMINESCENCE DISPLAY DEVICE
摘要 Provided is a method of producing an organic electroluminescence display device including patterning by photolithography, the method including: forming an organic compound layer containing a low-molecular organic electroluminescence material and an intermediate layer for protecting the organic compound layer; forming a resist layer on the intermediate layer; irradiating the resist layer with ultraviolet light through a photomask to partially remove the resist layer in a region irradiated with the ultraviolet light; and removing the organic compound layer in a region from which the resist layer is removed, in which the resist layer includes a layer formed of a positive resist, and the intermediate layer includes a layer formed of a high-molecular organic material having a chain structure, capable of being selectively dissolved in a solvent that dissolves the organic compound layer.
申请公布号 US2013084531(A1) 申请公布日期 2013.04.04
申请号 US201213623919 申请日期 2012.09.21
申请人 CANON KABUSHIKI KAISHA;CANON KABUSHIKI KAISHA 发明人 HAMAGUCHI ATSUSHI;SATO NOBUHIKO
分类号 G03F7/20 主分类号 G03F7/20
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