ANTI-CHARGING SURFACE PASSIVATION FOR CHARGED PARTICLE OPTICS

摘要

A method of forming an anti-charging passivation on an object used in charged particle environments includes discharging a carbon arc in a vacuum to produce a carbon vapor, wherein the carbon vapor deposits on the object substantially in the form of graphite, positioning the object on a stage to expose a one or more surfaces of the object to the carbon vapor; and coating the object with graphite to a specified thickness.