ALTERNATING CURRENT DRIVE ELECTROSTATIC CHUCK

摘要

This alternating current electrostatic chuck is characterized by being provided with a dielectric substrate having protruding parts formed on a main surface of a side for mounting an object to be adsorbed and a lower surface part formed at the periphery of the protruding parts, and electrodes provided on the dielectric substrate. The alternating current electrostatic chuck is further characterized by the electrodes including a plurality of electrode elements that are disposed separated from each other, being able to apply alternating current voltages that differ from each other in phase to each of the plurality of electrode elements, and protruding parts being disposed on the main surface at a prescribed spacing according to the shape of the plurality of electrode elements. Local damage to some of the protruding parts provided on the mounting surface side can be suppressed.