| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an exhaust trap capable of achieving both improvement in collection efficiency and reduction in blockage. <P>SOLUTION: An exhaust trap includes: an inflow port into which an exhaust gas from a processing device is flown; an outflow port of which the exhaust gas from the inflow port is flown out; and a plurality of baffle plates each having one or a plurality of first openings each having a first opening dimension, and having a plurality of second openings each having a second opening dimension smaller than the first opening dimension, arranged between the inflow port and the outflow port so as to cross a flowing direction of the exhaust gas flowing from the inflow port to the outflow port. The first openings of the one baffle plate among the plurality of baffle plates and the first openings of the adjacent baffle plate are displaced from each other relative to the flowing direction. An interval between the two baffle plates adjacent to each other among the plurality of baffle plates is in a range of 0.5 to 2 times of the second opening dimension. <P>COPYRIGHT: (C)2013,JPO&INPIT |
