| 摘要 |
A clean room gasflow distribution test method, device and system, designed to overcome the defects such as low accuracy of existing visual test methods. The clean room gasflow distribution test method utilizes a thermal imaging device to detect a sample gasflow formed by the sample gas in the clean room, the sample gas being liquid nitrogen, dry ice, water vapor or other gases having temperature differences with ambient gas. The clean room gasflow distribution test device and system comprise a sample gas generator and a thermal imaging device; the thermal imaging device can continuously detect and display the spatial position of the sample gas on a display. The clean room gasflow distribution test method provides a more accurate test result, and protects a clean room from being contaminated; the detection device is of mature technology and high test accuracy. The clean room gasflow distribution test device and system utilize the sample gas generator and a temperature detection device, thus improving detection accuracy and extending detection scope. |
