| 摘要 |
PURPOSE: A semiconductor substrate, an electronic device including the same, and a manufacturing method thereof are provided to prevent the crack and stress generated in an insulating layer. CONSTITUTION: A semiconductor substrate includes a conductor and an insulating layer(3). The conductor includes a metal or alloy component of a nanocompostie crystalline structure. The insulating layer surrounds the conductor and is made of nanocrystal and nano amorphous silica(320). The nanocomposite crystalline structure consists of nanocrystal, nano amorphous silica, and fine silica particles(311). |
