| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a composite substrate capable of improving productivity, and a manufacturing device of the composite substrate. <P>SOLUTION: A manufacturing method of a composite substrate 1 comprises the steps of: forming at least one first recess 12 on a first principal surface 11 of a silicon substrate 10; bonding a glass substrate 20 to the first principal surface 11 of the silicon substrate 10; forming a plurality of second recesses 14 at least a part of each of which communicates with the first recess 12 on a second principal surface 13 opposite to the first principal surface 11 of the silicon substrate 10; and putting the glass substrate 20 into a viscous flow state by heating it and filling the first recess 12 and the second recesses 14 with the glass substrate 20 by sucking the glass substrate from the second principal surface 13 side of the silicon substrate 10. <P>COPYRIGHT: (C)2013,JPO&INPIT |
