发明名称 |
METHOD OF MANUFACTURING ACTUATOR FOR MICRO EJECTOR |
摘要 |
There is provided a method of manufacturing an actuator for a micro ejector. The method of manufacturing an actuator for a micro ejector may include: forming grooves in a first surface of a piezoelectric element; attaching the first surface of the piezoelectric element to a substrate; and machining a second surface of the piezoelectric element.
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申请公布号 |
US2013081239(A1) |
申请公布日期 |
2013.04.04 |
申请号 |
US201213364970 |
申请日期 |
2012.02.02 |
申请人 |
KIM SANG JIN;KU BO SUNG;SAMSUNG ELECTRO-MECHANICS CO., LTD. |
发明人 |
KIM SANG JIN;KU BO SUNG |
分类号 |
H04R17/00 |
主分类号 |
H04R17/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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