| 发明名称 |
METHOD FOR REMOVAL OF CARBON FROM ORGANOSILICATE MATERIAL |
| 摘要 |
<P>PROBLEM TO BE SOLVED: To remove at least a portion of carbon-containing species within an organosilicate (OSG) film. <P>SOLUTION: There is described herein a method for removing at least a portion of carbon-containing species within an organosilicate (OSG) film by: treating the OSG film with a chemical, such as but not limited to an oxidizer; exposing the OSG film to an energy source comprising ultraviolet light; or treating the OSG film with a chemical and exposing the OSG film to an energy source. <P>COPYRIGHT: (C)2013,JPO&INPIT |
| 申请公布号 |
JP2013062530(A) |
申请公布日期 |
2013.04.04 |
| 申请号 |
JP20120257513 |
申请日期 |
2012.11.26 |
| 申请人 |
AIR PRODUCTS & CHEMICALS INC |
发明人 |
WU AIPING;WEIGEL SCOTT JEFFREY;BRAYMER THOMAS ALBERT |
| 分类号 |
H01L21/312;H01L21/768;H01L23/532 |
主分类号 |
H01L21/312 |
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