| 发明名称 |
GROUP III-V SUBSTRATE MATERIAL WITH PARTICULAR CRYSTALLOGRAPHIC FEATURES |
| 摘要 |
A substrate including a body comprising a Group III-V material and having an upper surface, the body comprising an offcut angle defined between the upper surface and a crystallographic reference plane, and the body further having an offcut angle variation of not greater than about 0.6 degrees.
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| 申请公布号 |
US2013082279(A1) |
申请公布日期 |
2013.04.04 |
| 申请号 |
US201213630858 |
申请日期 |
2012.09.28 |
| 申请人 |
FAURIE JEAN-PIERRE;BEAUMONT BERNARD |
发明人 |
FAURIE JEAN-PIERRE;BEAUMONT BERNARD |
| 分类号 |
H01L21/324;H01L29/04 |
主分类号 |
H01L21/324 |
| 代理机构 |
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代理人 |
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