METHOD FOR MANUFACTURING ANISOTROPIC MATERIAL USING METAL REFLOW AND ANISOTROPIC MATERIAL MANUFACTURED BY THE SAME
摘要
PURPOSE: A manufacturing method of an anisotropy element and a method thereof are provided to implement fine pitch connection by forming a nanostructure or a microstructure with the anisotropy element. CONSTITUTION: After a plate-shaped substrate is annealed, an electro polishing process of the plate-shaped substrate is executed(a-1). The pre-processed substrate is firstly anodized(a-2). An oxide layer of the substrate which is firstly anodized is eliminated in an etching process(a-3). The plate-shaped substrate is secondly anodized(a-4). A plurality of minute through holes is extended by acid treatment(a-5). [Reference numerals] (AA) Surface; (BB) Lateral cross section; (CC) Start; (DD) Pre-treatment; (EE) Firstly anodizing; (FF) Oxide etching; (GG) Secondly anodizing; (HH) Through hole extension; (II) End; (JJ) Step a-1; (KK) Step a-2; (LL) Step a-3; (MM) Step a-4; (NN) Step a-5;
申请公布号
KR20130033603(A)
申请公布日期
2013.04.04
申请号
KR20110097352
申请日期
2011.09.27
申请人
KOREA INSTITUTE OF ENERGY RESEARCH;KOREA ELECTRONICS TECHNOLOGY INSTITUTE
发明人
KO, CHANG HYUN;KIM, JONG NAM;PARK, JONG HO;HAN, SANG SUP;BEUM, HEE TAE;HAN, CHUL JONG