| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve the stability of a size and a position of a target in an extreme ultraviolet light generation apparatus. <P>SOLUTION: An ultraviolet light generation apparatus may include: a target storage part storing a target material; a nozzle part outputting the target material; an electrode generating a target of the target material when a direct current voltage is applied between itself and the target material; a target detector detecting the target and outputting a detection signal; a chamber where extreme ultraviolet light is generated; a direct current voltage regulator adjusting the direct current voltage applied between the target material and the electrode; a pressure regulator adjusting a pressure applied to the target material stored in the target storage part; and a control unit controlling at least one of the direct current voltage regulator and the pressure regulator on the basis of the detection signal output from the target detector. <P>COPYRIGHT: (C)2013,JPO&INPIT |
