| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a fluid feed pump that can feed a fluid with high efficiency even when driven with a period shorter than a time constant τ making internal pressure of a pump chamber decrease. <P>SOLUTION: The fluid is fed toward a fluid channel from an outlet channel of the fluid feed pump. When the fluid channel is directly connected to the outlet channel, channel resistance acts in the fluid channel. Thus, when the fluid feed pump is driven, the internal pressure of the pump chamber increases, and subsequently decreases along with the direct flow of the fluid to the fluid channel from the outlet channel. The fluid feed pump is driven with the period shorter than the time constant τ making the internal pressure of the pump chamber in this case decrease, and an outlet-side buffer chamber with compliance greater than that of the pump chamber is preprovided between the outlet channel and the fluid channel. Thereby, even when the liquid feed pump is driven with the period shorter than the time constant τ making the internal pressure of the same chamber decrease, the fluid can be efficiently fed by utilizing a pressure oscillation generated between the pump chamber and the outlet-side buffer chamber. <P>COPYRIGHT: (C)2013,JPO&INPIT |
