METHOD OF GENERATING RECIPE FOR MANUFACTURING TOOL AND SYSTEM THEREOF

摘要

PROBLEM TO BE SOLVED: To provide a method and system for automated recipe creation on the basis of design data.

SOLUTION: A computer creates a recipe for a manufacturing tool on the basis of design data. The computer obtains the design data, which includes basic elements and hierarchical levels corresponding to the basic elements. The computer selects one or more basic elements of interest and generates one or more sets of simple array cells corresponding to a level of interest. The computer uses the sets of simple array cells to identify periodical areas in level-of-interest coordinates to enable automated recipe creation. The periodical areas are identified with respect to one or more basic elements.

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