| 摘要 |
<P>PROBLEM TO BE SOLVED: To inhibit the deterioration of a Q value of a vibration piece, and to provide a vibrator, an oscillator, and an electronic apparatus which include a vibration piece where the deterioration of the Q value is inhibited. <P>SOLUTION: A crystal vibration piece 1 includes: a base part 10; vibration arms 11a, 11b, 11c; and excitation electrodes 12a, 12b, 12c which are provided at the vibration arms 11a, 11b, 11c. The excitation electrodes 12a, 12b, 12c have: first electrodes 12a1, 12b1, 12c1 provided at the main surface 10a side of the vibration arms 11a, 11b, 11c; second electrodes 12a2, 12b2, 12c2 which are provided facing the first electrodes 12a1, 12b1, 12c1; and a piezoelectric material 13 extending between the first electrodes 12a1, 12b1, 12c1 and the second electrodes 12a2, 12b2, 12c2. Indium Tin Oxide is used at least either one of the first electrodes 12a1, 12b1, 12c1 and the second electrodes 12a2, 12b2, 12c2. <P>COPYRIGHT: (C)2013,JPO&INPIT |
