| 摘要 |
<p>[Problem] To provide a terahertz emission microscope having improved detection accuracy of terahertz microwaves, and to provide a photoconductive element and a lens to be used in the terahertz emission microscope, and a device manufacturing method. [Solution] This photoconductive element is provided with a base material, electrodes, and a film material. The base material has an input surface having inputted thereto terahertz microwaves, which are generated by radiating pulsed-laser beams to a device, i.e., an object to be observed, said pulsed-laser beams having been generated from a light source. The electrodes are formed on the base material, and detect the terahertz microwaves inputted to the input surface of the base material. The film material is formed on the input surface of the base material, passes through the terahertz microwaves, and reflects the pulsed-laser beams.</p> |
