| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vacuum chuck device which can be easily attached to various kinds of machine tools without requiring much operational time and effort and which is energy-saving and inexpensive and has a simple structure. <P>SOLUTION: A first piston 14 and a second piston 15 are fitted in first and second cylinder chambers 11, 12, respectively, so as to be reciprocable in an axial direction. The first piston and the second piston are connected. A first space 11a and a second space 11b are formed in the first cylinder chamber by the first piston. A third space 12a and a fourth space 12b are formed in the second cylinder chamber by the second piston. During clamping, a fluid in the second space is discharged, and the fluid is pressed into the third space. During unclamping, the fluid in the third space is discharged, and the fluid is pressed into the second space 11b. <P>COPYRIGHT: (C)2013,JPO&INPIT |
