PLASMA TUNING RODS IN MICROWAVE RESONATOR PLASMA SOURCES
摘要
<p>The invention provides a plurality of resonator subsystems. The resonator subsystems can comprise one or more resonant cavities configured to couple electromagnetic (EM) energy in a desired EM wave mode to plasma by generating resonant microwave energy in a resonant cavity adjacent the plasma. The resonator subsystem can be coupled to a process chamber using one or more interface subsystems and can comprise one or more resonant cavities, and each resonant cavity can have a plurality of plasma tuning rods coupled thereto. Some of the plasma tuning rods can be configured to couple the EM-energy from one or more of the resonant cavities to the process space within the process chamber.</p>
申请公布号
WO2013049700(A1)
申请公布日期
2013.04.04
申请号
WO2012US58094
申请日期
2012.09.28
申请人
TOKYO ELECTRON LIMITED;TOKYO ELECTRON U.S. HOLDINGS, INC.;ZHAO, JIANPING;CHEN, LEE;FUNK, MERRITT;IWAO, TOSHIHIKO;VENTZEK, PETER
发明人
ZHAO, JIANPING;CHEN, LEE;FUNK, MERRITT;IWAO, TOSHIHIKO;VENTZEK, PETER