| 摘要 |
<p>A transport system (1) is provided with a storage case (12), a lifting/lowering apparatus (13), a transfer apparatus (14) and a transport apparatus (15). The lifting/lowering apparatus (13) lifts/lowers the storage case (12), and successively positions each substrate (11) therein at a pickup position. The transfer apparatus (14) receives the substrate (11) located at the pickup position, and at the transfer position, transfers said substrate (11) to the transport apparatus (15). The transport apparatus (15) has a pair of belts (51, 51) provided with a space therebetween in the left/right direction. The pair of belts (51, 51) is provided with multiple profile supports (54) in mutual association therebetween. Associated profile supports (54) move together in the direction of transport, and are configured so as to support the perimeter of the substrate (11) transferred at the transfer position, and to position said substrate (11) into the designated position.</p> |
