| 摘要 |
<p>A conveyance device (1) that conveys items for conveyance inside a second conveyance chamber (14) that can be vacuum evacuated, comprising: a moving container (20) configured so as to be movable inside the second conveyance chamber (14); and a supply nozzle (42) arranged fixed inside the second conveyance chamber (14), and which supplies a gas. The moving container (20) has: a space section (20b) cut off from the atmosphere inside the container; a gas supply unit (22) having a gas supply port communicating with the space section (20b) disposed therein, and which guides gas from the gas supply port to the space section (20b) in accordance with the pressure of the gas supplied from the supply nozzle (42) to the gas supply port when the moving container (20) has moved to a prescribed position; and an exhaust unit (23) having an exhaust port communicating with the space section (20b) disposed therein, and which discharges gas in the space section (20b) from the exhaust port, in accordance with the air pressure of the space section (20b).</p> |
