| 摘要 |
PURPOSE: An apparatus for growing a high quality ingot is provided to prevent the generation of carbon impurities by using a guide member. CONSTITUTION: A crucible(100) accommodates a raw material(130). An upper cover(140) hermetically closes the crucible. A seed crystal(160) is adhered to a seed crystal holder(170). A guide member(180) is positioned between the crucible and the seed crystal holder. The guide member includes tantalum, hafnium, niobium, zirconium, or tungsten. An insulating material(200) surrounds the crucible. A quartz tube(400) is positioned in the outer side of the crucible.
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