| 摘要 |
[Object] To provide a carrier disassembling apparatus capable of disassembling a carrier for test. [Means for solving] A carrier disassembling apparatus 1, which disassembles a carrier for test 60, comprises a holding head 11 that holds a cover member 80, a holding table 20 that holds a base member 70, and a first carrier arm 16 that causes the holding head 11 to depart relatively from the holding table 20 to separate the cover member 80 and the base member 70 from each other, the holding head 11 has a first closing member 12 that forms a first closed space 13 between the holding head 11 and the cover member 80, the holding table 20 has a second closing member 21 that forms a second closed space 24 between the holding table 20 and the base member 70, and the carrier disassembling apparatus 1 further comprises a vacuum pump 90 that reduces pressure within the closed spaces 13 and 24. |
