| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an optical element having excellent antireflection performance, in a wide wavelength region of visible to near-infrared rays, and a wide incident light angle range. <P>SOLUTION: In an optical element, any vertex of a plurality of projection portions (11) has a height of 200 nm or higher from a reference surface, a space between any one vertex of the plurality of the projection portions (11) and the vertex of the projection portion (11) which is the closest to the projection portion (11) is less than 260 nm in plan view, a ratio occupied by a region having a height of 250 nm or higher from the reference surface in plan view with respect to an area in a predetermined region in plan view is 5% or more, and average deviation of heights of a fine uneven structure (10) is 3 or more and 8 or less. In the fine uneven structure (10), in a curve indicating a relationship between the height and a ratio of an area occupied by a region of the height or higher in the predetermined region in plan view, there exist two or more inflection points. <P>COPYRIGHT: (C)2013,JPO&INPIT |
