发明名称 |
PLASMA DEPOSITION PROCESS FOR PRODUCING AN OPTICAL PREFORM WITH A CLADDING GLASS LAYER COMPOSED OF FLUORINE-DOPED QUARTZ GLASS |
摘要 |
In plasma deposition processes for producing an optical preform according to the POD method, a cladding glass layer composed of fluorine-doped quartz glass is produced by means of a plasma torch on a cylindrical substrate body composed of quartz glass, said substrate body rotating about the longitudinal axis thereof. In this case, the plasma torch performs a reversing relative movement between two turning points (A; B) along the substrate body. In order, proceeding therefrom, to achieve a high fluorine doping in conjunction with a dopant distribution that is as uniform as possible axially, the invention proposes that a heat element has a heating effect on the region of one turning point (A; B) when the plasma torch is situated in the region of the other turning point (B; A). |
申请公布号 |
WO2013014258(A3) |
申请公布日期 |
2013.04.04 |
申请号 |
WO2012EP64748 |
申请日期 |
2012.07.26 |
申请人 |
HERAEUS QUARZGLAS GMBH & CO. KG;SCHULTHEIS, ANDREAS;BRAEUER, KARSTEN;SCHMIDT, RICHARD |
发明人 |
SCHULTHEIS, ANDREAS;BRAEUER, KARSTEN;SCHMIDT, RICHARD |
分类号 |
C03B37/014 |
主分类号 |
C03B37/014 |
代理机构 |
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主权项 |
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地址 |
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