发明名称 PLASMA DEPOSITION PROCESS FOR PRODUCING AN OPTICAL PREFORM WITH A CLADDING GLASS LAYER COMPOSED OF FLUORINE-DOPED QUARTZ GLASS
摘要 In plasma deposition processes for producing an optical preform according to the POD method, a cladding glass layer composed of fluorine-doped quartz glass is produced by means of a plasma torch on a cylindrical substrate body composed of quartz glass, said substrate body rotating about the longitudinal axis thereof. In this case, the plasma torch performs a reversing relative movement between two turning points (A; B) along the substrate body. In order, proceeding therefrom, to achieve a high fluorine doping in conjunction with a dopant distribution that is as uniform as possible axially, the invention proposes that a heat element has a heating effect on the region of one turning point (A; B) when the plasma torch is situated in the region of the other turning point (B; A).
申请公布号 WO2013014258(A3) 申请公布日期 2013.04.04
申请号 WO2012EP64748 申请日期 2012.07.26
申请人 HERAEUS QUARZGLAS GMBH & CO. KG;SCHULTHEIS, ANDREAS;BRAEUER, KARSTEN;SCHMIDT, RICHARD 发明人 SCHULTHEIS, ANDREAS;BRAEUER, KARSTEN;SCHMIDT, RICHARD
分类号 C03B37/014 主分类号 C03B37/014
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