SCANNING ELECTRON MICROSCOPE EQUIPPED WITH BACK SCATTERED ELECTRON DETECTION FUNCTION

摘要

The present invention relates to a scanning electron microscope equipped with a back scattered electron detection function, which causes primary electrons generated from a light source to enter a specimen, and after the primary electrons have entered therein, detects emitted electrons which are emitted from the specimen. The scanning electron microscope equipped with a back scattered electron detection function is characterised by comprising: a Wien filter unit, which is arranged between the light source and the specimen, and which separates the emitted electrons into secondary electrons and back scattered electrons by generating a magnetic field and an electric field; and a detecting unit which detects the secondary electrons and back scattered electrons separated by the Wien filter unit. Thus, provided is a scanning electron microscope equipped with a back scattered electron detection function which enables the separation and detection of secondary electrons and back-scattered electrons due to the use of a Wien filter.