ARRAY SUBSTRATE AND MANUFACTURING METHOD THEREOF AND DISPLAY DEVICE

摘要

Provided are a thin film transistor array substrate and manufacturing method thereof and a display device, the thin film transistor array substrate manufacturing method comprising: obtaining a gate line and a gate electrode (202) on a base substrate (201) via a first-time patterning treatment process; forming a gate insulation layer (203) on the gate line and the gate electrode (202); forming a graphene layer (204) on the gate insulation layer (203), and obtaining a semiconductor active layer (207) above the gate electrode (202) via a second-time patterning treatment process and hydrogen treatment; obtaining a data wire, a source electrode (208), a drain electrode (206) and a pixel electrode (205) on the same layer via a third-time patterning treatment process; forming a protective layer (209) on the data wire, the source electrode (208), the semiconductor active layer (207), the drain electrode (206) and the pixel electrode (205). The thin film transistor array substrate improves the structure of the thin film transistor array substrate, reduces the thickness and simplifies the process.