METHOD OF MAKING MASK, PATTERNING METHOD USING THE MASK, AND METHOD OF MANUFACTURING MICRO DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method of making a mask for stably patterning a thin film.

SOLUTION: The present invention relates to the method of making a mask for patterning a thin film. The method includes a step S1 of depositing an inorganic material soluble in an alkaline solution on a substrate, a step S2 of forming the inorganic material into a predetermined pattern, and a step S3 of forming a mask by narrowing the inorganic material by the alkaline solution.

COPYRIGHT: (C)2013,JPO&INPIT