| 发明名称 |
METHOD FOR MANUFACTURING SOLID ELECTROLYTE THIN FILM AND MANUFACTURING DEVICE THEREOF |
| 摘要 |
The present invention relates to a method for manufacturing a solid electrolyte thin film and a manufacturing device thereof which has an improved film forming rate, remarkably reduces damage to a thin film, enables conformal deposition by using an organic chemical vapor deposition method, and can even be used in a thin film cell having a trench structure. |
| 申请公布号 |
WO2013019041(A9) |
申请公布日期 |
2013.04.04 |
| 申请号 |
WO2012KR06044 |
申请日期 |
2012.07.27 |
| 申请人 |
GS CALTEX CORPORATION;PARK, HO-YOUNG;JIN, SANG-WAN |
发明人 |
PARK, HO-YOUNG;JIN, SANG-WAN |
| 分类号 |
H01M10/0562;C23C16/30;H01M10/04;H01M10/052 |
主分类号 |
H01M10/0562 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
