MOLD BLANK, MASTER MOLD, COPY MOLD, AND METHOD FOR MANUFACTURING MOLD BLANK

摘要

In a mold blank provided with a hard mask layer, the hard mask layer has a composition that includes chromium, nitrogen, and oxygen, and also has a content changing structure in which the nitrogen content changes continuously or stepwise in the direction of layer thickness and the oxygen content changes continuously or stepwise in substantially the opposite orientation of the nitrogen in the direction of that layer thickness.