Spiral vacuum deposition apparatus and method,申请号US19650516893-传众专利搜索

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发明名称	Spiral vacuum deposition apparatus and method
摘要
申请公布号	US3386853(A)	申请公布日期	1968.06.04
申请号	US19650516893	申请日期	1965.12.28
申请人	PAUL E. OBERG;MAYNARD C. PAUL	发明人	OBERG PAUL E.;PAUL MAYNARD C.
分类号	C23C14/24	主分类号	C23C14/24
代理机构		代理人
主权项
地址

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