发明名称 |
PARTICLE-OPTICAL SYSTEMS AND ARRANGEMENTS AND PARTICLE-OPTICAL COMPONENTS FOR SUCH SYSTEMS AND ARRANGEMENTS |
摘要 |
A particle-optical component comprises at least one multi-aperture plate having a plurality of apertures formed therein, each for manipulating particles of a charged particle beamlet passing therethrough; wherein the multi-aperture plate comprises plural conductive layer portions arranged substantially in a single plane, wherein plural apertures are formed in each of the plural conductive layer portions, and wherein a resistant gap is formed between adjacent conductive layer portions. |
申请公布号 |
EP2575144(A1) |
申请公布日期 |
2013.04.03 |
申请号 |
EP20120190690 |
申请日期 |
2004.09.07 |
申请人 |
CARL ZEISS SMT GMBH;APPLIED MATERIALS ISRAEL |
发明人 |
KNIPPELMEYER, RAINER;KIENZLE, OLIVER;KEMEN, THOMAS;MUELLER, HEIKO;UHLEMANN, STEPHAN;HAIDER, MAXIMILIAN;CASARES, ANTONIO;ROGERS, STEVEN |
分类号 |
H01J37/317;G01N23/00;G21K5/10;H01J;H01J37/09;H01J37/10;H01J37/14;H01J37/153;H01J37/28 |
主分类号 |
H01J37/317 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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