APPARATUS FOR PREPARING GERMANE GAS AND THE METHOD FOR PREPARING MONO GERMANE GAS USING THE SAME

摘要

PURPOSE: A germane gas manufacturing apparatus is provided to stably generate a large amount of mono-germane gas by mixing a reaction material in short time and removing the reaction heat by using a reactor with microchannel. CONSTITUTION: A germane gas manufacturing apparatus comprises a first channel(10), a second channel(20), a third channel(30), an outlet(40), and a refrigerant circulating part(50). Alkali aqueous solution is injected into the first channel and acid aqueous solution is injected into the second channel. Mono-germane gas and reaction solution are formed by mixing and reacting the alkali aqueous solution and acid aqueous solution. The mono-germane gas is discharged through the outlet from the third channel. The refrigerant circulating part is arranged near the third channel and a refrigerant is injected and discharged. Reaction heat from the third channel is absorbed into the refrigerant circulating part. The third channel is microchannel.