SUBSTRATE TREATING SYSTEM

摘要

PURPOSE: A substrate processing system is provided to efficiently transfer a plurality of receivers by using a plurality of movers. CONSTITUTION: A substrate processing apparatus(5) includes a substrate processing unit(11), a load port(13), and an inner buffer(15) and processes a substrate from a FOUP(Front Opening Unified Pod)(3). The load port transceives the FOUP between the substrate processing apparatus and a carrier transfer system(7). The carrier transfer system transfers the FOUP between a storage part and the substrate processing apparatus. A host computer(9) communicates between the carrier transfer system and the substrate processing apparatus. The host computer commands the carrier transfer system to transfer the FOUP according to a situation of the substrate processing apparatus. [Reference numerals] (9) Host computer;