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发明名称
摘要
申请公布号
JP5176863(B2)
申请公布日期
2013.04.03
申请号
JP20080270978
申请日期
2008.10.21
申请人
发明人
分类号
H03H9/25;H01L41/09;H01L41/18;H03H9/64
主分类号
H03H9/25
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