| 摘要 |
PURPOSE: An arc detecting power control device and method are provided to reduce arc generation by feedback controlling power using arc potential. CONSTITUTION: An upper electrode(210) and a lower electrode(220) are arranged in a plasma chamber(200). A processed substrate(230) is mounted on the lower electrode. A power supply source(10) supplies power to the upper electrode. An arc detecting power control device(100) detects arc from power. An arc detector detects an arc component from the power. An arc potential detector detects arc potential from the arc component. A reference value comparison unit compares the arc potential and a reference value. A power controller controls the power supply source. [Reference numerals] (100) Arc detecting power control device; (300) Arc generation monitor; (400) Alarm device |
