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发明名称
SPUTTERING TECHNIQUE
摘要
申请公布号
IL23185(A)
申请公布日期
1968.08.22
申请号
IL19650023185
申请日期
1965.03.19
申请人
WESTERN ELECTRIC CO INC
发明人
分类号
C23C14/28;C23C14/35;H01B1/00;H01J37/34;(IPC1-7):H01L/
主分类号
C23C14/28
代理机构
代理人
主权项
地址
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